The man who turned the times

Chapter 358 Extreme Ultraviolet Lithography Machine
Su Yang looked at Liu Yuanlong for half a second, and said, "These devices are indeed the latest core semiconductor devices, especially lithography machines."

He said, pointing to the lithography machine: "The lasers, beam straighteners, energy controllers, beam shape settings, shutters, energy detectors, and masks in this lithography machine are all cutting-edge technology products in the world. "

Su Yang continued: "In addition, the motion control precision of the mask stage reaches the nanometer level, and the objective lens, measuring stage, exposure stage, internal closed frame, vibration absorber, etc. are all the most advanced products at present."

"Of course, the most important thing is the light source of this lithography machine, not the deep ultraviolet light that is currently popular at home and abroad."

"The light used is 13.5nm soft X-rays, that is, extreme ultraviolet light as the light source."

Su Yang's voice fell.

The scene suddenly became silent.

The four cold bodyguards don't know what to say. As retired soldiers, they don't know anything about these technological gadgets, and they are completely confused.

But seeing the people in the semiconductor company, everyone was dumbfounded, as if they were stupid, and felt that the boss's words were unclear.

After a brief silence, there was an uproar, and the seven people including An Zhengguo talked a lot.

"This……"

"Using 13.5nm extreme ultraviolet light?"

"How is it possible? I just read the news two days ago. Nikon's lithography machine is just preparing to develop a 32nm semiconductor process, and the light source still uses 193nm deep ultraviolet light!"

"Yeah, the exposure wavelength has suddenly dropped to 13.5nm. Doesn't this mean...it can expand the lithography technology to a feature size below 32nm!!!"

"President Su, don't you just make us happy, there is absolutely no semiconductor company in the world that can manufacture such equipment!"

"President Su, is this true or false!"

Several high-level executives of Yuanyang Semiconductor all had red eyes, and their eyes kept lingering on Su Yang and the lithography machine.

As the jewel in the crown of the semiconductor manufacturing industry, the significance of lithography machines is self-evident.

Chip production requires 20-30 photolithography operations, which take up about 50% of the IC production process and one-third of the chip production cost.

Generally speaking, as long as the problem of the lithography machine is solved, the chip manufacturing project is half completed.

Therefore, it is no wonder that a few semiconductor guys looked at him like idiots.

Su Yang smiled and said: "Okay, don't look at me like this. It's useless for me to say whether it's true or not. It's clear at a glance by calling people to conduct an experiment? Mr. An, there should be photolithography in the factory. Glue and silicon, right?"

An Zhengguo was taken aback, and quickly said: "Yes, they are all in storage. I will find someone to conduct experiments immediately."

As he spoke, An Zhengguo immediately summoned his staff and brought in the corresponding semiconductor materials.

Semiconductor chip production is mainly divided into three links: IC design, IC manufacturing, and IC packaging and testing.

The so-called IC is the English abbreviation for integrated circuit.

IC design is a high-end technology, and it is also one of the most important factors for companies such as inter to stand at the pinnacle of the semiconductor industry.

Mainly based on the design purpose of the chip, logic design and rule formulation are carried out, and masks are made according to the design drawings for use in subsequent photolithography steps.

IC manufacturing is the manufacture of semiconductor chips.

Generally, it is necessary to realize the transfer of the chip circuit diagram from the mask to the silicon wafer, and realize the predetermined chip function.

Including photolithography, etching, ion implantation, thin film deposition, chemical mechanical polishing and other steps.

As for IC packaging and testing, it is to complete the packaging and performance and functional testing of chips, which is the final process before product delivery.

Not to mention IC design, Su Yang has the technology of Apple A6 processor, which includes the design of 32nm chip.

In addition, the inter Core series hanging in the mall also has the process technology of 45nm-14nm chips.

In IC manufacturing, photolithography is the most complex and critical process step in the semiconductor chip production process, which is time-consuming and costly.

The difficulty and key point is to transfer the circuit diagram from the mask to the silicon wafer.

This process, at present, can only be achieved most effectively by photolithography.

Therefore, the process level of lithography often directly determines the process level and performance level of the chip.

An Zhengguo recruited technical personnel and materials. Under Su Yang's guidance, these employees who specialized in chip production had a preliminary understanding of the process of using this lithography machine.

The principle of lithography is actually very simple.

A layer of highly photosensitive photoresist is covered on the surface of the silicon wafer, and then the light is irradiated on the surface of the silicon wafer through the mask.

Photoresist reacts when exposed to light.

After that, the irradiated or unirradiated photoresist is washed away with a specific solvent, and the transfer of the circuit pattern from the mask to the silicon wafer is realized.

There are actually some similarities between this and ancient Chinese printing, but photolithography is thousands of times more difficult than printing.

The general photolithography steps include vapor phase base film formation, spin coating, soft baking, exposure, development, and film hardening.

Next, inspections are carried out, mainly development inspections, so that compliant silicon wafers enter the subsequent etching process.

The so-called etching is the process of selectively removing unnecessary materials from the surface of silicon wafers by chemical or physical methods.

After completion, the remaining photoresist on the surface of the silicon wafer can be washed away by a specific solvent.

Of course, this is the simplest photolithography step, but in actual production, it is hundreds of times more complicated than this.

From the beginning of photolithography to the final washing off of the remaining photoresist, it took more than three hours for a few steps.

Of course, there are also factors that some employees have just come into contact with the new equipment and cannot operate it smoothly.

When the time came to 04:30 in the afternoon.

In the workshop, there was a scene of surprise and joy.

"It came out, it was actually made!"

"The 60nm circuit diagram was actually transferred to the silicon wafer by us."

"It's unbelievable! There are no more than three companies in China that can produce 60nm chips, and all of them are technologies that just broke through in the second half of 18, and they are still in the laboratory! If mass production is achieved, it will be by the end of this year, or even next year. Went at the beginning of the year."

"Yes, but now we have a lithography machine that can mass-produce 60nm chips. If the operation is proficient, the speed will increase, and then alternate lithography, at least hundreds of 12-inch round chips can be produced a day. Crystal!"

"This is a breakthrough, a remarkable breakthrough. If we announce what happened here, it will be enough to shock the entire China, and even the central government will be alarmed!"

Huaxia has been suppressed for too many years in the semiconductor industry.

Since the last century, it has been running behind the ass of Western countries, and it is not an exaggeration to say that it is begging for technology from others.

Although there is still a certain gap between the mass production of 60nm chips and the mass production of 45nm chips.

However, in terms of craftsmanship, it can also prove that Huaxia is not far behind Inter and others.

It was a very morale-boosting breakthrough.

On the side, Liu Yuanlong said in a deep voice: "Everyone, don't you realize that? What we used just now is only the bottom-line precision of this lithography machine!"

As soon as these words came out, the excited guys immediately stopped talking, opened their mouths instead, and immediately opened their eyes wide.

"Yeah, the lowest precision was used just now!"

"That's right, if it goes up a scale, doesn't it mean... 45nm or even 32nm chips are also possible?"

"No, I read an academic report before. The real field of EUV lithography technology is 32nm, no, it is the field below 22nm!"

"Below 22nm, this... this is too crazy."

"..."

(End of this chapter)